wafer leveling

基本解釋

The Test Bench built for Wafer Focusing and Leveling Sensor is to measure and evaluate its performance.
硅片調焦調平測量系統(tǒng)測試平臺用于對光刻機硅片調焦調平測量系統(tǒng)的性能進行檢測。
Image quality is the key performance of the optical lithography tool and it relies on the performance of wafer focusing and leveling measurement system.
成像質量是光學光刻機的最主要指標，硅片調焦調平測量是光刻機控制成像質量的基礎。